Dual-spot phase-sensitive detection

Details Dual-spot phase-sensitive detection Dual-spot phase-sensitive detection

2006-02-21

2006-02-21

Turner, Samuel A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07002695

ABSTRACT:
Apparatus for optical assessment of a sample includes a radiation source, adapted to generate a beam of coherent radiation, and traveling lens optics, adapted to focus the beam so as to generate first and second spots on a surface of the sample and to scan the spots together over the surface. Collection optics are positioned to collect the radiation scattered from the first and second spots and to focus the collected radiation so as to generate a pattern of interference fringes. A detector detects a change in the pattern of the interference fringes as the spots are scanned over the surface.

REFERENCES:
patent: 3796495 (1974-03-01), Laub
patent: 3851951 (1974-12-01), Eveleth

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