Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Patent
1992-10-20
1994-11-01
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
33568, 248179, G21K 510
Patent
active
053609743
ABSTRACT:
A dual quad flexure carriage and assembly, for receiving a sensing probe, is used for scanning the sensing probe across a target surface. The flexure carriage is a unitary structure providing flat motion for the sensing probe during the scanning procedure, while further compensating for thermal creep. The dual quad flexure assembly comprises the dual quad flexure carriage along with piezo actuators and control systems to provide highly linear orthogonal motion.
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Hammond James M.
Klos Martin A.
Martin Yves
Roessler Kenneth G.
Stowell Robert M.
Berman Jack I.
International Business Machines Corp.
Strimaitis Romualdas
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