Dual plane robot

Details Dual plane robot Dual plane robot

1996-07-15

1998-08-04

Ro, Bentsu

Electricity: motive power systems

Plural, diverse or diversely controlled electric motors

Mechanically coupled in fixed ratio of movement

901 14, 901 23, 464 29, 7449003, 318625, B25J 1800, B65G 4907

Patent

active

057898782

ABSTRACT:
The present invention provides a robot assembly for transferring objects, namely substrates, through a process system. A robot linkage is provided to a multi-plane, multi-arm robot assembly driven by two motors. In one embodiment, a linkage is provided which is driven by two magnetic retaining rings. In another embodiment, a linkage is provided which is driven by three magnetic retaining rings, two of which are coupled to the same motor. Both embodiments enable a substrate shuttle operation to be performed wherein a pair of substrates can be shuttled into and out of a selected chamber without having the robot assembly rotate in the transfer and by actuation of only two motors.

REFERENCES:
patent: 4712971 (1987-12-01), Flyer
patent: 4897015 (1990-01-01), Abbe et al.
patent: 4990047 (1991-02-01), Wagner et al.
patent: 5102280 (1992-04-01), Poduje et al.
patent: 5227708 (1993-07-01), Lowrance
patent: 5324155 (1994-06-01), Goodwin et al.
patent: 5522275 (1996-06-01), Mauletti

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