Dual oxide channel stop for semiconductor devices

Fishing – trapping – and vermin destroying

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437 53, 437 70, 437185, 357 24, H01L 21302

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active

050432931

ABSTRACT:
The disclosure relates to oxide-semiconductor interfaces which are grown with varying amounts of fixed positive (or negative) charge. The invention utilizes these different values to form a channel stop for a charge transfer device. For HgCdTe two different oxides are used, namely, those produced by wet anodization (having large values of fixed positive charge) and plasma oxidation (having low values of fixed charge). The voltage range of operation of the active gate is determined by the difference in fixed positive charge for these regions and the insulator thicknesses.

REFERENCES:
patent: 3434868 (1969-03-01), Jorgensen
patent: 3463974 (1969-08-01), Kelley et al.
patent: 3649886 (1972-03-01), Kooi
patent: 3787251 (1974-01-01), Brand et al.
patent: 4231149 (1980-11-01), Chapman et al.
patent: 4323589 (1982-04-01), Roy et al.
Sze, Physics of Semiconductor Devices, Wiley, N.Y. .COPYRGT. 1981, pp. 412-416.
Cook, "Anodizing Silicon is Economical Way to Isolate IC Elements", Electronics, Nov. 13, 1975, pp. 109-113.

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