Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-07-20
2011-12-13
Kasenge, Charles (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S245000, C414S222080, C414S935000
Reexamination Certificate
active
08078304
ABSTRACT:
Electronic device manufacturing systems and methods are provided. In some aspects, a system having a dual-mode robot is provided which is disposed within a system component (e.g., a factory interface or transfer chamber) and adapted to operate in a first mode and a second mode. In the first mode, the robot may transfer a substrate between components of the system (e.g., between a carrier and a process chamber or chamber to chamber) and in the second mode, the robot may execute a process motion profile (e.g., metrology).
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Egan Todd J.
Hudgens Jeffrey C.
Peterson Ingrid B.
Rice Michael R.
Applied Materials Inc.
Dugan & Dugan PC
Kasenge Charles
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