Dual-energy electron flooding for neutralization of charged...

Details Dual-energy electron flooding for neutralization of charged... Dual-energy electron flooding for neutralization of charged...

2005-08-16

2005-08-16

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S307000, C250S309000

Reexamination Certificate

active

06930309

ABSTRACT:
One embodiment disclosed relates to a method of electron beam inspection or review of a substrate having insulating materials therein. An area of the substrate is simultaneously exposed to a lower-energy electron beam and an overlapping higher-energy electron beam. The area is subsequently inspected with another electron beam. Another embodiment disclosed relates to an electron beam tool for examination of a substrate having insulating materials therein. A first cathode is configured as an electron source for a lower-energy electron beam, and a second cathode is configured as an electron source for a higher-energy electron beam. At least one electron lens is configured to focus the lower-energy electron beam and the higher-energy electron beam onto an overlapping area of a substrate. An electron beam column is subsequently used to examine the substrate.

REFERENCES:
patent: 4818872 (1989-04-01), Parker et al.
patent: 5444242 (1995-08-01), Larson et al.
patent: 5576538 (1996-11-01), Sakai et al.
patent: 5668368 (1997-09-01), Sakai et al.
patent: 5959305 (1999-09-01), Mack et al.
patent: 5977549 (1999-11-01), Wang et al.
patent: 6462332 (2002-10-01), Trompenaars et al.
patent: 6570154 (2003-05-01), Masnaghetti et al.
patent: 6600163 (2003-07-01), Halling
patent: 6610980 (2003-08-01), Veneklasen et al.
patent: 6803571 (2004-10-01), Mankos et al.

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