Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1996-08-20
1998-06-23
Werner, Frank E.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
414939, 414940, 118719, B65G 6500
Patent
active
057695881
ABSTRACT:
A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first chamber is being accessed, a second cassette of wafers may be loaded in the second chamber and the second chamber pumped down. Each chamber is designed to minimize intrusion to a clean room. Thus a door to each chamber has a mechanism which, when opening the door, first moves the door slightly away from an opening in the chamber and then the door is moved down parallel to the chamber. After the door is opened, a cassette of wafers is lowered through the opening in a motion much like a drawbridge. The cassette may be pivoted within the chamber when the position from which wafers are accessed from the cassette differs from the position from which the cassette is lowered out of the chamber.
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Cheng David
Hall Leonard
Howard James
Murdoch Steven C.
Salzman Phil M.
Applied Materials Inc.
Werner Frank E.
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