Electricity: motive power systems – Plural – diverse or diversely controlled electric motors – Mechanically coupled in fixed ratio of movement
Patent
1996-11-18
1998-11-17
Ro, Bentsu
Electricity: motive power systems
Plural, diverse or diversely controlled electric motors
Mechanically coupled in fixed ratio of movement
901 14, 901 23, 464 29, 7449003, 31856811, 318625, B25J 1800, B65G 4907
Patent
active
058381210
ABSTRACT:
A multi-blade wafer handling device is provided to concurrently move two or more wafers through a vacuum processing system. The wafer handling device includes two motors magnetically coupled into a transfer chamber to move an arm assembly connected to a dual blade assembly. The preferred wafer handling device includes a first rotating member operated by the first motor, a second rotating member operated by the second motor, a blade assembly having at least first and second wafer blades wherein the wafer blades are co-planar, and an arm assembly connecting the first and second rotating members to the blade assembly.
REFERENCES:
patent: 4785962 (1988-11-01), Toshima
patent: 4819167 (1989-04-01), Cheng et al.
patent: 5120019 (1992-06-01), Davis, Jr.
patent: 5133284 (1992-07-01), Thomas et al.
patent: 5147175 (1992-09-01), Tada
patent: 5226632 (1993-07-01), Tepman et al.
patent: 5275303 (1994-01-01), Szalai
patent: 5292393 (1994-03-01), Maydan et al.
patent: 5302209 (1994-04-01), Maeda et al.
patent: 5363872 (1994-11-01), Lorimer
patent: 5469035 (1995-11-01), Lowrance
patent: 5494494 (1996-02-01), Mizuno et al.
patent: 5505779 (1996-04-01), Mizuno et al.
Z. Shiller and S. Dubowski, "Robot Path Planning with Obstacles, Actuator, Gripper, and Payload Constraints," International Journal of Robotics Research, vol. 8, No. 6, Dec. 1989, pp. 3-18.
Z. Shiller and H.H. Lu, "Computation of Path Constrained Time Optimal Motions With Dynamic Singularities," Transactions of the ASME, Journal of Dynamic Systems, Measurement, and Control, vol. 114, Mar. 1992, pp. 34-40.
Colborne Kelly
Fairbairn Kevin
Lane Christopher
Sundar Satish
Applied Materials Inc.
Ro Bentsu
LandOfFree
Dual blade robot does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dual blade robot, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dual blade robot will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-887526