Dryer lid/robot collision prevention system

Details Dryer lid/robot collision prevention system Dryer lid/robot collision prevention system

2006-02-21

2006-02-21

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S559400, C034S058000

Reexamination Certificate

active

07002134

ABSTRACT:
A dryer lid/robot collision prevention system which prevents inadvertent collision of a spin dryer lid with a transfer robot as the robot approaches and loads wafer-containing cassettes into the spin dryer. The system includes at least one, and typically, a pair of photoelectric sensors mounted on an inner wall behind the spin dryer lid. Each of the photoelectric sensors is electrically connected to a relay circuit which activates a cylinder sensor in the spin dryer in the event that the photoelectric sensors sense the normal position of the open spin dryer lid. The cylinder sensors activate a PLC module, which activates the cassette cradles in the spin dryer. Finally, the activated mode of the cassette cradles signals the transfer robot to approach and load the wafer cassettes into the cassette cradles. The system may include a bypass switch for bypassing the system, as desired.

REFERENCES:
patent: 5150532 (1992-09-01), Aigo
patent: 6571488 (2003-06-01), Lin et al.
patent: 2001092081 (2001-10-01), None
patent: 2001092082 (2001-10-01), None

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