Dry film photoresist

Details Dry film photoresist Dry film photoresist

2008-01-29

2008-01-29

Schilling, Richard L. (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S286100, C430S287100, C430S916000, C522S034000, C522S035000, C522S905000, C522S904000

Reexamination Certificate

active

10391051

ABSTRACT:
A dry film photoresist includes a functional polymer. The functional polymer has α,β-unsaturated groups and groups that generate a free radical upon exposure to actinic radiation.

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