Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1989-10-16
1990-08-14
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 156657, 156345, 20419237, 252 791, B44C 122, C03C 1500, C03C 2506, C23F 100
Patent
active
049484613
ABSTRACT:
An etching plasma containing a reactive fluorine-containing gas and atoms or ions of a heavy metal is particularly useful in a method of removing material from a substrate by reactive ion etching.
REFERENCES:
patent: 4375385 (1983-03-01), Halon
patent: 4624736 (1986-11-01), Gee et al.
patent: 4631105 (1986-12-01), Carroll et al.
Davis William J.
Eastman Kodak Company
Powell William A.
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