Driving mechanism and micro-mirror device provided with the...

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Reexamination Certificate

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Details

C359S225100, C359S291000

Reexamination Certificate

active

07405506

ABSTRACT:
A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.

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patent: 5-076186 (1993-03-01), None
patent: 2000-147419 (2000-05-01), None
patent: 2003-029172 (2003-01-01), None
English Language Abstract of JP 5-076186.
English Language Abstract of JP 2000-147419.
English Language Abstract of JP 2003-029172.
U.S. Appl. No. 11/187,984, filed Jul. 25, 2005.

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