Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Patent
1997-10-29
2000-08-01
Hoff, Marc S.
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
702 84, 700 12, 700108, 454140, 454187, G06F 1130, G05B 1100, F24F 706
Patent
active
060980230
ABSTRACT:
A monitoring device and a driving control system for a fan filter unit in a semiconductor clean room for monitoring the operating state of the fan filter unit. The monitoring device includes a switching section in each fan filter unit which alternately applies electrical power to one of a plurality of terminals. The switching section is responsive to a force from an air stream introduced therein via rotation of a fan in the fan filter unit. A display section in each fan filter unit is connected to the plurality of terminals which provide different signals, indicative of an on or off state of the fan, according to which of the plurality of terminals is electrically connected to the electrical power.
REFERENCES:
patent: 5096477 (1992-03-01), Shinoda et al.
patent: 5626820 (1997-05-01), Kinkead et al.
patent: 5664995 (1997-09-01), O'Keefe
patent: 5810657 (1998-09-01), Pariseau
patent: 5828572 (1998-10-01), Hasegawa et al.
Ahn Yo-han
Choi Jae-heung
Hwang Jung-sung
Lee Dong-joo
Bui Bryan
Hoff Marc S.
Samsung Electronics Co,. Ltd.
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