Drive circuit for a MEMS device

Details Drive circuit for a MEMS device Drive circuit for a MEMS device

2005-04-12

2005-04-12

Dang, Hung Xuan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

06879429

ABSTRACT:
Small mechanical devices fabricated from semiconductor substrates called micro-electromechanical systems (MEMS) are used in the telecommunications industry for various purposes, such as switching and attenuation. Typically a small mirror or arm is moved into or out of the optical path of a beam of light to redirect of attenuate the signal. The present invention relates to a drive circuit for a MEMS device that converts a low voltage source into a higher more useful voltage pulse. The present invention also relates to an optically powered MEMS device utilizing the aforementioned drive circuit. Moreover, the drive circuit according to the present invention can be used to generate a single exponentially decaying pulse that can both generate an actuation force and a braking force for the MEMS device.

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