Drive checking system for fan filter units in clean room

Details Drive checking system for fan filter units in clean room Drive checking system for fan filter units in clean room

1998-10-14

2000-07-25

Simmons, David A.

Gas separation

Combined or convertible

In environmental air enclosure

55471, 55484, 55DIG34, 96421, 454187, 116266, B01D 35143

Patent

active

060932295

ABSTRACT:
A fan drive checking system, for an air conditioning system in a clean room having a fan filter unit (FFU), includes a flow sensor for sensing air flow inside a housing of a FFU. The sensor provides a sensor signal indicative of normal and adverse flow conditions in the housing. A control portion in data communication with the sensor outputs a control signal responsive to the sensing signal. An alarm in data communication with the control portion provides a warning when the control signal indicates the adverse flow condition.

REFERENCES:
patent: 4820319 (1989-04-01), Griffis
patent: 5069113 (1991-12-01), Mattson et al.

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