DRAM cell with buried collar and self-aligned buried strap

Details DRAM cell with buried collar and self-aligned buried strap DRAM cell with buried collar and self-aligned buried strap

2005-12-13

2005-12-13

Thomas, Tom (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S301000

Reexamination Certificate

active

06974991

ABSTRACT:
In a DRAM cell having a trench, a cell capacitor and a cell transistor, a node conducting element connects the cell capacitor to the cell transistor and a collar is disposed about the node conducting element. The collar is disposed in the substrate at least partially, up to entirely outside of the trench. Because the collar is disposed in the substrate outside of the trench, it does not restrict the size of the trench opening. This enables sub-100 nm trenches, using techniques which are compatible with contemporary DRAM process steps. A strap is embedded into a top surface of the collar.

REFERENCES:
patent: 5849638 (1998-12-01), Ho et al.
patent: 6184549 (2001-02-01), Furukawa et al.
patent: 6190988 (2001-02-01), Furukawa et al.
patent: 6403412 (2002-06-01), Economikos et al.
patent: 6414347 (2002-07-01), Divakaruni et al.
patent: 6448131 (2002-09-01), Cabral et al.
patent: 6495411 (2002-12-01), Mei
patent: 6544838 (2003-04-01), Ranade et al.
patent: 6555430 (2003-04-01), Chudzik et al.
patent: 6583462 (2003-06-01), Furukawa et al.
patent: 6599798 (2003-07-01), Tews et al.
patent: 2002/0105019 (2002-08-01), Mandelman et al.
patent: 2002/0106857 (2002-08-01), Jammy et al.

Affiliated with

Also associated with

Rating

DRAM cell with buried collar and self-aligned buried strap does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with DRAM cell with buried collar and self-aligned buried strap, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and DRAM cell with buried collar and self-aligned buried strap will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3469721