Double-sided substrate cleaning apparatus

Details Double-sided substrate cleaning apparatus Double-sided substrate cleaning apparatus

1994-11-04

1996-05-21

Collins, Laura

Coating apparatus

With means to centrifuge work

15 77, 15 882, 118 58, 118 66, 118 72, 118 73, 118232, 118240, 118244, 118319, 118321, 118323, 118503, 118642, 118712, 134902, 414936, 414941, B05C 100

Patent

active

055185428

ABSTRACT:
There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.

REFERENCES:
patent: 3691582 (1972-09-01), Call
patent: 4935981 (1990-06-01), Ohtani et al.
patent: 4936329 (1990-06-01), Michael et al.
patent: 5250114 (1993-10-01), Konishi et al.
patent: 5345639 (1994-09-01), Tanoue et al.
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5357645 (1994-10-01), Onodera
patent: 5361449 (1994-11-01), Akimoto
patent: 5375291 (1994-12-01), Tateyama et al.
patent: 5403397 (1995-04-01), Beckers et al.

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