Double-sided substrate cleaning apparatus

Coating apparatus – With means to centrifuge work

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15 77, 15 882, 118 58, 118 66, 118 72, 118 73, 118232, 118240, 118244, 118319, 118321, 118323, 118503, 118642, 118712, 134902, 414936, 414941, B05C 100

Patent

active

055185428

ABSTRACT:
There is provided a double-sided substrate cleaning apparatus including a carrier station for loading/unloading a carrier in which objects to be processed are stored, a convey mechanism for conveying an object taken out from the carrier station, at least one cleaning mechanism, arranged along a convey path on which the convey mechanism conveys the object, for cleaning the object, and an object reversing mechanism, arranged along the convey path, for reversing the object.

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patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5357645 (1994-10-01), Onodera
patent: 5361449 (1994-11-01), Akimoto
patent: 5375291 (1994-12-01), Tateyama et al.
patent: 5403397 (1995-04-01), Beckers et al.

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