Double reflection electron emission microscope

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

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250397, H01J 37147

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active

059693568

ABSTRACT:
Described is an electron microscope, with which different study modes can be conducted. An electron reflector is mounted in the rear focal plane of the objective lens or in one of its conjugate planes and oriented in such a manner that the primary beam coming from the electron source is focused on the specimen to be studied. The reflector tip can be made of a monocrystal or a polycrystalline material.

REFERENCES:
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patent: 4460827 (1984-07-01), Onoguchi et al.
patent: 4812652 (1989-03-01), Egle et al.
patent: 4988868 (1991-01-01), Gray
patent: 5061850 (1991-10-01), Kelly et al.
patent: 5319207 (1994-06-01), Rose et al.

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