Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1996-11-22
1999-10-19
Anderson, Bruce
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250397, H01J 37147
Patent
active
059693568
ABSTRACT:
Described is an electron microscope, with which different study modes can be conducted. An electron reflector is mounted in the rear focal plane of the objective lens or in one of its conjugate planes and oriented in such a manner that the primary beam coming from the electron source is focused on the specimen to be studied. The reflector tip can be made of a monocrystal or a polycrystalline material.
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Anderson Bruce
Focus GmbH
Stockton LLP Kilpatrick
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