Double capacitor and manufacturing method thereof

Details Double capacitor and manufacturing method thereof Double capacitor and manufacturing method thereof

1989-05-31

1990-09-04

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

357 51, 29 2542, H01G 438, H01G 700, H01L 2702

Patent

active

049549278

ABSTRACT:
A double capacitor and the method of manufacturing the same contains two capacitors connected in parallel within a semiconductor integrated circuit. A common ground conductor used by both capacitors is formed using a tri-layer mask and sputtering process that gives the conductor a U shape, which results in a larger charging capacity compared with a conventional capacitor using the same chip area.

REFERENCES:
patent: 4685197 (1987-08-01), Tigelaar et al.
patent: 4686552 (1987-08-01), Teng et al.
patent: 4702937 (1987-10-01), Yamoto et al.

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