Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-08-01
2006-08-01
Thomas, Tom (Department: 2815)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S330000, C257S333000, C257S335000, C438S259000, C438S270000
Reexamination Certificate
active
07084457
ABSTRACT:
A DMOS device having a trench bus structure thereof is introduced. The trench bus structure comprises a field oxide layer formed on a P substrate, and a trench extending from an top surface of the field oxide layer down to a lower portion of the P substrate. A gate oxide layer and a polysilicon bus are formed to fill the trench as a main portion of the bus structure. In addition, an isolation layer and a metal line are formed atop the polysilicon bus and the field oxide layer. An opening is formed in the isolation layer to form connections between the polysilicon bus and the metal line. In specific embodiments, the bus trench and the gate trenches of the DMOS device are formed simultaneously, and the polysilicon bus and the gate electrode are formed simultaneously as well. Therefore, the bus structure is able to form the DMOS transistor without demanding any lithographic step for defining the position of the polysilicon bus.
REFERENCES:
patent: 4791462 (1988-12-01), Blanchard et al.
patent: 5597765 (1997-01-01), Yilmaz et al.
patent: 6031265 (2000-02-01), Hshieh
patent: 6413822 (2002-07-01), Williams et al.
patent: 2004/0188775 (2004-09-01), Peake et al.
Chang Chien-Ping
Chuang Chiao-Shun
Hsieh Hsin-Huang
Tseng Mao-Song
Mosel Vitelic Inc.
Thomas Tom
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