Wave transmission lines and networks – Coupling networks – Balanced to unbalanced circuits
Reexamination Certificate
2005-08-23
2005-08-23
Jones, Stephen E. (Department: 2817)
Wave transmission lines and networks
Coupling networks
Balanced to unbalanced circuits
C333S115000, C333S033000, C315S111210
Reexamination Certificate
active
06933801
ABSTRACT:
An apparatus and method for maximizing ac energy delivered to a load by minimizing energy reflected from a load, such as an RF power source coupled to a plasma load for substrate processing chambers, including a matching network, wherein the matching network couples an ac power source and load. The matching network having two transmissions lines that are inductively coupled for a fixed portion of their length, such length being at least one wavelength of the ac energy generated by the ac power source. The matching circuit providing continuously variable impedance matching through the use of fixed components.
REFERENCES:
patent: 2470307 (1949-05-01), Guanella
patent: 3025480 (1962-03-01), Guanella
patent: 3654570 (1972-04-01), Thomas
patent: 4641111 (1987-02-01), Chapell
patent: 5148132 (1992-09-01), Chapell
patent: 5283087 (1994-02-01), Yamazaki et al.
patent: 5350479 (1994-09-01), Collins et al.
patent: 5689215 (1997-11-01), Richardson et al.
patent: 5793162 (1998-08-01), Barnes et al.
patent: 5874704 (1999-02-01), Gates
patent: 5889252 (1999-03-01), Williams et al.
patent: 5933770 (1999-08-01), Heiter
patent: 5952896 (1999-09-01), Mett et al.
patent: 6043607 (2000-03-01), Roderick
patent: 6106737 (2000-08-01), Tomoyasu et al.
Tanaka Tsutomu
Wolff Stefan A.
Applied Materials Inc.
Jones Stephen E.
Townsend & Townsend and Crew
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