Display substrate and method of manufacturing the same

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Reexamination Certificate

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C438S151000, C438S158000

Reexamination Certificate

active

07745342

ABSTRACT:
A display substrate having a low-resistance metallic layer and a method of manufacturing the display substrate. The gate conductors are extended in a first direction. The source conductors are extended in a second direction crossing the first direction including a lower layer of molybdenum or a molybdenum alloy, and an upper layer of aluminum or an aluminum alloy. The pixel areas are defined by the gate conductors and the source conductors. A switching element is formed in each of the pixel areas and includes a gate electrode extended from the gate conductor and a source electrode extended from the source conductor. The pixel electrode includes a transparent conductive material, and is electrically connected to a drain electrode of the switching element.

REFERENCES:
patent: 2001/0025959 (2001-10-01), Yamazaki et al.
patent: 2005/0046762 (2005-03-01), Kim et al.
patent: 2006/0186411 (2006-08-01), Kim et al.
patent: 2006/0262244 (2006-11-01), Cho et al.
patent: 2006/0262263 (2006-11-01), Yang et al.
patent: 2007/0164330 (2007-07-01), Jeong et al.
patent: 2007/0243650 (2007-10-01), Kim et al.
patent: 2008/0002152 (2008-01-01), Collins et al.
patent: 1501153 (1999-12-01), None
patent: 1610110 (2005-04-01), None
patent: 1702531 (2005-11-01), None

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