Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2011-08-02
2011-08-02
Pham, Hoai v (Department: 2892)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S151000, C257SE21320, C257SE21561
Reexamination Certificate
active
07989274
ABSTRACT:
A display device including an oxide thin film transistor (TFT) is disclosed. A nitride-based gate insulating layer of a gate pad area is etched when an oxide semiconductor layer of a pixel area is etched by using a half-tone mask, a metal layer is formed at a contact hole of the etched gate insulting layer, and then a passivation layer formed thereon is etched. Thus, an overhang of the passivation layer can be prevented from being generated when the gate insulating layer is etched, and accordingly, the fabrication process can be simplified.
REFERENCES:
patent: 7781268 (2010-08-01), Byun et al.
Kang Im-Kuk
Kim Dae-Won
Brinks Hofer Gilson & Lione
LG Display Co. Ltd.
Pham Hoai v
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