Displacement element, probe employing the element, and apparatus

Details Displacement element, probe employing the element, and apparatus Displacement element, probe employing the element, and apparatus

1996-01-26

1997-05-20

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

310330, H01J 3700

Patent

active

056314639

ABSTRACT:
A cantilever type displacement element includes a piezoelectric film and an electrode provided on each face of the film to displace the film by convence piezoelectric effect. The electrodes are formed from platinum or palladium. The displacement element constitutes a cantilver type probe having a tip on the free end of the element. The probe is used in a scanning tunneling microscope or an information processing apparatus.

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