Displacement element, cantilever probe and information processin

Details Displacement element, cantilever probe and information processin Displacement element, cantilever probe and information processin

1994-06-03

1995-03-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

369126, 310309, H01J 3728

Patent

active

053960661

ABSTRACT:
A displacement element including a substrate having electrodes and a cantilever provided on the substrate, wherein the cantilever is formed from a semiconductor material and has at least two electrostatic driving electrodes formed by diffusing an impurity into a semiconductor material.

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