Displacement device, particularly for the photolithographic trea

Details Displacement device, particularly for the photolithographic trea Displacement device, particularly for the photolithographic trea

1986-03-11

1987-04-07

McGraw, Vincent P.

Optics: measuring and testing

By polarized light examination

With birefringent element

356244, 356399, G01B 1127, G01B 902

Patent

active

046555943

ABSTRACT:
A displacement device, particularly useful in an apparatus for the photolithographic treatment of a substrate, is provided with a holder placed on a carriage mechanism being acted upon by driving members for imparting translational and rotary movements to the holder. The carriage is constituted by a lower carriage part and an upper carriage part, each of which has a flat surface facing each other. Three linear driving members, each having a housing and a driving element projecting from both ends of the housing, and axially moving with respect to the housing, act upon the carriage. The housing of the first driving member is connected to an upper carriage part, while the driving elements of the second and third driving members are coupled to the lower carriage part with the second and third driving members respectively being connected to the first driving member in an arrangement in the shape of an H.

REFERENCES:
patent: 3550276 (1970-12-01), Kramer et al.
patent: 3622244 (1971-11-01), Chitayat
patent: 3884580 (1975-05-01), Webster et al.
patent: 3941480 (1976-03-01), Webster et al.
patent: 4226526 (1980-10-01), Spence-Bate et al.
patent: 4311390 (1982-01-01), Phillips
patent: 4345836 (1982-08-01), Phillips
patent: 4464030 (1984-08-01), Gale et al.

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