Displacement detection system

Details Displacement detection system Displacement detection system

1995-07-10

1997-03-11

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

2502014, 250237G, 25055929, G01B 1100

Patent

active

056107196

ABSTRACT:
A system for detecting displacement of a surface in a direction normal to the surface, the system including a first grating; a second grating; an optical subsystem for projecting an image of the first grating onto the surface and for directing a secondary image of the first grating reflected off the surface onto the second grating; and a detector, responsive to the fringe pattern formed after the secondary image passes through the second grating, for detecting displacement of the surface in a direction normal to the surface.

REFERENCES:
patent: 3858981 (1975-01-01), Jaerisch et al.
patent: 4009386 (1977-02-01), Deml et al.

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