Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-07-28
2008-10-21
Garber, Charles D. (Department: 2812)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C427S255394, C118S715000
Reexamination Certificate
active
07439180
ABSTRACT:
A dispenser system for use in atomic beam assisted metal organic chemical vapor deposition is provided as well as a method of depositing an ultra-thin film using the same. The inventive dispenser system includes an atomic source having an unimpeded line of site to a substrate and an annular metal organic chemical vapor deposition showerhead having a plurality of nozzles for delivering a precursor to the substrate. In accordance with the present invention, each of the nozzles present on the showerhead is angled to provide precursor beam trajectories that crossover and are non-intercepting.
REFERENCES:
patent: 5741547 (1998-04-01), Akram et al.
patent: 6596133 (2003-07-01), Moslehi et al.
Guha Supratik
McFeely Fenton R.
Yurkas John J.
Garber Charles D.
International Business Machines - Corporation
Patel Reema
Scully , Scott, Murphy & Presser, P.C.
Tuchman, Esq. Ido
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