Dispense nozzle design and dispense method

Details Dispense nozzle design and dispense method Dispense nozzle design and dispense method

1998-01-22

2000-01-11

Bell, Janyce

Coating processes

Centrifugal force utilized

118 52, 118320, D23213, 222526, 222533, 4273855, 427422, B05D 312, B05C 1102, B67D 300

Patent

active

060133155

ABSTRACT:
A dispense nozzle (10), having a narrow oblong orifice (14), is positioned over and near the surface of the substrate (22), close to the edge of the substrate. While the substrate is rotating, the nozzle dispenses fluid through the narrow oblong orifice onto the substrate surface, starting from near the outer edge (24) moving toward the substrate's rotational center (26). The narrow oblong orifice may have lips of unequal size to help direct fluid flow. A controlled rate of acceleration is maintained for the rate of translation of the nozzle across the substrate surface. Once the nozzle approaches the substrate's rotational center, the nozzle is raised to a higher height above the surface of the substrate while continuing to dispense fluid. Then the dispense stream of fluid is terminated, and the substrate is rapidly accelerated to a predetermined spin speed to evenly distribute the fluid over the surface of the substrate to a uniform film of desired thickness.

REFERENCES:
patent: 5094884 (1992-03-01), Hillman
patent: 5127362 (1992-07-01), Iwatsu et al.

Affiliated with

Also associated with

Rating

Dispense nozzle design and dispense method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dispense nozzle design and dispense method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dispense nozzle design and dispense method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1460348