Disk exchangeable target mechanism with effective cooling means,

Details Disk exchangeable target mechanism with effective cooling means, Disk exchangeable target mechanism with effective cooling means,

1987-05-19

1989-02-21

Moore, David K.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504411, 2504421, 2504922, 313 35, G21K 508

Patent

active

048067695

ABSTRACT:
An improved disk exchangeable target mechanism for an ion implantation system includes an effective cooling means for preventing thermal damage to a resist and for improving an implantation quality of semiconductor wafers. The target mechanism includes a metal disk on which a semiconductor wafer(s) to be ion-implanted are mounted on a first face thereof, a support including a metal base having the target disk mounted thereon, and a shaft incorporated with the base, and a medium, provided between a second face of the target disk opposite to the first face and the base, for thermally contact therebetween. Preferably, the base of the support is provided with a cavity and the shaft is provided with holes communicating with the cavity, whereby a cooling medium is inserted into the cavity through one hole and is drained from the cavity through another hole. Furthermore, preferably, the target disk is provided with a thermal transportation unit, such as heat pipes, for transporting thermal energy from a portion(s) at which a high temperature is caused by ion implantation energy, to another portion(s) at which the temperature is low.

REFERENCES:
patent: 4453080 (1984-06-01), Berkowitz
patent: 4599516 (1986-07-01), Taya et al.
G. Ryding et al, "A High-Throughput Mechanically Scanned Target Chamber", 1981, Nuclear Instruments and Method, No. 189, p. 324, North Holland Publishing Company.

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