Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-07-10
2009-02-17
Lauchman, L. G (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
C356S364000
Reexamination Certificate
active
07492455
ABSTRACT:
A spectroscopic ellipsometer system comprising a plurality of individual sources which are sequentially energized to provide a sequence of beams, each of different polarization state but directed along a common locus toward a sample. The preferred spectroscopic ellipsometer system has no parts which move during data collection, and it provides a progressive plurality of sequentially discrete, rather than continuously varying, polarization states.
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Hale Jeffrey S.
He Ping
Johs Blaine D.
Liphardt Martin M.
Alli Iyabo S
J.A. Woollam Co. Inc.
Lauchman L. G
Welch James D.
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