Optics: measuring and testing – By polarized light examination – Of surface reflection
Reexamination Certificate
2006-07-11
2006-07-11
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
By polarized light examination
Of surface reflection
Reexamination Certificate
active
07075649
ABSTRACT:
Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is a calibration procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.
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Papers, by Azzam and Azzam et al. are also identified as concerning alternative approaches to the goal of the present invention, and are titled.
“Multichannel Polarization State Detectors For Time-Resolved Ellipsometry”, Thin Solid Film, 234 (1993); and.
“Spectrophotopolarimeter Based On Multiple Reflections In A Coated Dielectric Slab”, Thin Solid Films 313 (1998); and.
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“Accurate Calibration Of Four-Detector Photopolarimeter With Imperfect Polarization Optical Elements”, J. Opt. Soc. Am., vol. 6, No. 10, (Oct. 1989).
Review paper by Collins, titled “Automatic Rotating Element Ellipsometers: Calibration, Operation and Real-Time Applications”, Rev. Sci. Instrum., 61(8) (1990), is identified for general information.
Green Steven E.
Hale Jeffrey S.
Herzinger Craig M.
Johs Blaine D.
J.A. Woollam Co.
Pham Hoa Q.
Welch James D.
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