Direct write nanolithography using heated tip

Details Direct write nanolithography using heated tip Direct write nanolithography using heated tip

2006-08-30

2008-10-21

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S309000, C073S105000

Reexamination Certificate

active

07439501

ABSTRACT:
A device for sculpting a substrate includes a vertically displaceable probe having a nano-scale dimensioned probe tip. A displacement mechanism is configured to adjust a vertical displacement between the probe tip and the substrate. A heating mechanism selectively heats the probe tip to a preselected temperature that is sufficient to cause a portion of the substrate in contact with the probe tip to decompose.

REFERENCES:
patent: 7005378 (2006-02-01), Crocker et al.
patent: 7151256 (2006-12-01), Guillorn et al.
patent: 2003/0205657 (2003-11-01), Voisin
patent: 2004/0127025 (2004-07-01), Crocker, Jr. et al.
patent: 2004/0192041 (2004-09-01), Jeong et al.
patent: 2005/0103993 (2005-05-01), Guillorn et al.
patent: 2006/0040057 (2006-02-01), Sheehan et al.
patent: 2006/0254345 (2006-11-01), King et al.

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