Direct load/unload semiconductor wafer cassette apparatus and tr

Details Direct load/unload semiconductor wafer cassette apparatus and tr Direct load/unload semiconductor wafer cassette apparatus and tr

1993-01-14

1995-02-07

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414331, 414416, 4147446, 414225, 414939, 414937, 118719, 118500, 20429825, B65G 107

Patent

active

053870670

ABSTRACT:
A semiconductor cassetteand transfer system for facilitating the direct loading and unloading of wafers from different sides of a cassette by a first robot handling means moveable along a first extension axis and second robot handling means moveable along a second extension axis intersecting said first extension axis at an acute angle, and at a predetermined point concurrent with the center of the cassetteas it is disposed in a fixed position within a loadlock chamber of a wafer processing apparatus.

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patent: 4867631 (1989-09-01), Warenback et al.
patent: 4923054 (1990-05-01), Ohtani et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 5030056 (1991-07-01), Kitayama et al.
patent: 5058526 (1991-10-01), Matsushita et al.
patent: 5186594 (1993-02-01), Toshima et al.

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