Direct liquid injection of liquid ammonia solutions in chemical

Details Direct liquid injection of liquid ammonia solutions in chemical Direct liquid injection of liquid ammonia solutions in chemical

1996-06-28

1999-10-19

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

4272552, C23C 1634

Patent

active

059685948

ABSTRACT:
The invention encompasses delivery of reactants for chemical vapor deposition by direct liquid injection of a liquid ammonia solution. In a preferred embodiment, a solution of titanium tetraiodide in liquid ammonia provides reactants for the deposition of titanium nitride.

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