Direct imaging polymer fluid jet orifice

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making named article

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430394, 430396, 347 47, B41J 216

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active

061625892

ABSTRACT:
A process for creating and an apparatus employing shaped orifices in a semiconductor substrate. A first layer of material is applied on the semiconductor substrate then a second layer of material is then applied upon the first layer of material. An orifice image is then transferred to the first layer of material and a fluid-well image is transferred to the second layer of material. That portion of the second layer of material where the orifice image is located is then developed along with that portion of the first layer of material where the fluid well is located to define an orifice in the substrate.

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Arnost Reiser, Photoreactive Polymers: The Science and Technology of Resists, John Wiley & Sons, Feb. 1989, ISBN: 0471855502, pp 184-187.

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