Radiant energy – Electron energy analysis
Patent
1987-06-05
1989-03-07
Fields, Carolyn E.
Radiant energy
Electron energy analysis
250306, 250310, 250396ML, 250397, H01J 4008
Patent
active
048108804
ABSTRACT:
A direct-imaging, monochromatic electron microscope includes an objective lens for collecting a substantial portion of emitted electrons from an area across a sample surface, a first transfer lens for collimating the electrons into beams, an energy filter receptive of the beams to transit monochromatic beams, and a second transfer lens receptive of the monochromatic beams for refocusing the same through a projection lens to effect an image of the plurality of spots in a projection plane. The objective lens is formed of a magnetic toroidal coil having a central hole therein with a dish-shaped magnetically permeable member cupped coaxially over the toroidal coil. The permeable member has a neck portion protruding through the central hole. The sample surface is interposed proximate the objective lens between the objective lens and the energy filter.
REFERENCES:
patent: 3617741 (1971-06-01), Siegbahn et al.
patent: 3766381 (1973-04-01), Watson et al.
patent: 3777159 (1973-12-01), Hammond et al.
patent: 3822382 (1974-07-01), Koike
patent: 3870891 (1975-03-01), Mulvey
patent: 3937957 (1976-02-01), Schillalies et al.
patent: 4048498 (1977-11-01), Gerlach et al.
patent: 4315152 (1982-02-01), Smith
patent: 4540885 (1985-09-01), Plies et al.
Introduction to Analytical Electron Microscopy Plenum Press (N.Y. 1979) pp. 68 and 69.
Griffith/Photoelectron Microscopy-Applications to Biological Surfaces 1987, pp. 1-21.
Egerton, Philip, Turner, Whelan/Modification of a Transmission Electron Microscope to Give Energy-Filtered Images & Diffraction Patterns, and Electron Energy Loss Spectra, 1975 Journal of Physics E: Scientific Instruments, vol. 8, pp. 1033-1037.
Castaing/"Secondary Ions Microanalysis and Energy-Selecting Electron Microscopy", Electron Microscopy in Material Sciences, Acedemic Press (N.Y. 1971) pp. 103-161.
Juma, Khalig, Antar/"Some Properties of Single Pole Piece Objective Electron Lenses", Journal of Physics E: Scientific Instruments, vol. 16, pp. 1063-1068 (1983).
Orloff & Swanson/"An Asymmetric Electrostatic Lens for Field Emission Microprobe Applications" (1978).
"Electron Spectroscopies for Chemistry at Surfaces" by R. Caudano, et al, Examining the Submicron World, Ed. R. Feder et al., pp. 59-64, Plenum Press, NY, 1986.
"Proceedings of the Symposium on Electron Beam Testing," Nov. 9-10, 1984, Japan, Kawamoto, In-the-lens Analyzer.
Fields Carolyn E.
Grimes E. T.
Ingham H. S.
Masselle F. L.
Miller John A.
LandOfFree
Direct imaging monochromatic electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Direct imaging monochromatic electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Direct imaging monochromatic electron microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1670141