Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate
2007-08-28
2007-08-28
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
C250S397000
Reexamination Certificate
active
11295148
ABSTRACT:
A preferred method for transmission electron microscopy includes a step of generating a microscopy signal. The microscopy signal is then detected with an active pixel detector that includes a plurality of pixels. Each of the pixels includes at least one photodiode. Each pixel integrates an incident signal over a collection time period. Using a massively parallel on chip analog to digital conversion, very fast read out times can be achieved, e.g., many frames per second. In a preferred embodiment, the read out time permits there to be a single electron event recorded per pixel, indicating either a single electron or the lack thereof. This permits simple accumulation of the pixel counts for each pixel in read-out and storage electronics.
REFERENCES:
patent: 6285018 (2001-09-01), Aebi et al.
patent: 2006/0278943 (2006-12-01), Turchetta et al.
patent: WO 2004-099740 (2004-11-01), None
P.A. Thuman-Commike and W. Chiu, “Reconstruction Principles of Icosahedral Virus Structure Determination using Electron Microscopy,”Micron, vol. 31, 2000, pp. 687-711.
B. Bottcher, S.A. Wynne and R.A. Crowther, “Determination of the Fold of the Core Protein of Hepatitis B Virus by Electron Cryomicroscopy”,Nature, vol. 386, Mar. 1997, pp. 88-94.
I.S. Gabashvili, R.K. Agrawal, C.M. Spahn, R.A. Grassucci, D.I. Svergun, J. Frank, P. Penczek, “Solution Structure of theE. coli70S Ribosome at 11.5 A Resolution,”Cell, vol. 100, Mar. 3, 2000, pp. 537-549.
J. Frank et al., “Three-Dimensional Cryoelectron Microscopy of Ribosomes,”Method of Enzymology., vol. 317, 2000, pp. 276-291.
A.R. Faruqi, M.N. Andrews, “Cooled CCD Camera with Tapered Fibre Optics for Electron Microscopy,”Nucl. Inst. and Meth., vol. A392, 1997, p. 233-236.
G.Y. Fan, P. Datte, E. Beuville, J.F. eche, J. Millaud, K.H. Downing, F.T. Burkard, M.H. Ellisman, N.H. Xuong, “ASIC-Based Event-Driven 2D Digital Electron Counter for TEM Imaging”,Ultramicroscopy, vol. 70, 1998, pp. 107-113.
A.R. Faruqi, D.M. Cattermole, R. Henderson, B. Mikulec, C. Raeburn, “Evaluation of a Hybrid Pixel Detector for Electron Microscopy”,Ultramicroscopy, vol. 94, 2002, pp. 263-276.
R. Turchetta et al., “A Monolithic Active Pixel Sensor for Charge Particle Tracking and Imaging Using Standard VLSI CMOS Technology”,Nuclear Instruments and Methods in Physics Research A, vol. A458, 2001, pp. 677-689.
G. Claus et al., “Particle Tracking Using CMOS Monolithic Active Pixel Sensor”,Nuclear Instruments and Methods in Physics Research A, vol. A465, 2001, pp. 120-124.
S. Kleinfelder et al., “Integrated X-Ray and Charged Particle Active Pixel CMOS Sensor Arrays Using an Epitaxial Silicon Sensitive Region”,Proc. of the SPIE Hard X-Ray and Gamma Ray Detector, Physics IV, Jul. 2002, pp. 208-217.
H.S. Matis et al., “Charged Particle Detection Using a CMOS Active Pixel Sensor” LBNL-51911, Dec. 2002, 6 pp. Presented at IEEE 2002 Nuclear Science Symposium (NSS) and Medical Imaging Conference (MIC) and Symposium on Nuclear Power Systems, Norfolk, Virginia, Nov. 10-16, 2002. Published inIEEE Trans. Nucl. Sci., vol. 50, 2003, pp. 1020-1025.
G.Y. Fan and M.H. Ellisman, “Digital Imaging in Transmission Electron Microscopy,”Journal of Microscopy, vol. 200 (2000), p. 1-13.
G.Y. Fan, S. Peltier, S. Lamont, D. Dunkelberger, B. Burke, M.H. Ellisman, Multiport-Readout Frame-Transfer 5 Megapixel CCD Imaging System for TEM applications,Ultramicroscopy, vol. 84, 2000, p. 75-84.
B. Dierickx, G. Meynants, D. Scheffer, “Near 100% fill factor CMOS active pixels,” IEEE CCD & AlS workshop, Brugge, Belgium, Jun. 5-7, 1997, Proceedings p. P1.
G. Meynants, B. Dierickx and D. Scheffer, “CMOS active pixel image sensor with CCD performance,” APFAEC Europto/SPIE, Zurich, May 18-21, 1998; Proc. SPIE 3410, 1998, pp. 68-76.
S. Kleinfelder, F. Bieser, Y. Chen, R. Gareus, H.S. Matis, M. Oldenburg, F. Retiere, H.G. Ritter, H. H. Wieman, E. Yamamoto, “Novel Integrated CMOS Sensor Circuits,” IEEE Transactions on Nuclear Science, vol. 51, No. 5, Oct. 2004, pp. 2328-2336.
S. Kleinfelder, F. Bieser, Y. Chen, R. Gareus, H.S. Matis, M. Oldenburg, F. Retiere, H.G. Ritter, H.H. Wieman, E. Yamamoto, “Novel Integrated CMOS Pixel Structures for Vertex Detectors,” Nuclear Science Symposium, 2003, Conference Record of the 2003 IEEE, 2003, pp. 335-339.
H.S. Matis, F. Biester, S. Kleinfelder, G. Rai, F. Retiere, H.G. Ritter, K. Singh, S.E. Wurzell, H. Wieman, E. Yamamoto, “A CMOS Active Pixel Sensor for Charged Particle Detection,” Nuclear Science Symposium, 2002. Conference Record of the 2002 IEEE 1, 2002, pp. 259-263.
N.H. Xuong et al., “First Use of a High Sensitivity Active Pixel Sensor Array as a Detector for Electron Microscopy,” Proc. SPIE 5301, 2004, pp. 242-249.
A.R. Faruqi, “Prospects for Hybrid Pixel Detectors in Electron Microscopy”,Nuclear Instruments and Methods in Physics Research A, vol. A466, 2001, pp. 146-154.
Z. Czyzewski, D.O. Maccallum, A Romig, D.C. Joy, “Calculations of Mott Scattering Cross Section,”Journal of Applied Physics, vol. 68, No. 1, Oct. 1, 1990, pp. 3066-3072.
H. Bichsel, “Inelastic Electronic Collision Cross Sections for Monte Carlo Calculations”, Nuclear Instruments & Methods in Physics Research Section B, Beam Interactions with Materials and Atoms, vol. 52, 1990, pp. 136-139.
R. Lata et al, “Maturation Dynamics of a Viral Capsid: Visualization of Transitional Intermediate States”,Cell, vol. 100, Jan. 21, 2000, pp. 253-263.
J. Frank, “The Ribosome—a Macromolecular Machine par Excellence”,Chemistry&Biology, vol. 7, 2000, pp. R133-R141.
Davies, C. & S.W. White, “Electrons and x-rays gang up on the ribosome”,Structure, vol. 8, 2000, pp. R41-R45.
Baker, T.S., and Johnson, J.E., “Low resolution meets high: towards a resolution continuum from cells to atoms”, Curr. Opin. Struct. Biol. 6: (1996), pp. 585-594.
E.H.M. Heijne, “Semiconductor Micropattern Pixel Detectors: A Review of the Beginnings,”Nuclear Instruments&Methods in Physics Research, Section A., vol. A465, 2001, pp. 1-26.
H.S. Matis et al., “A CMOS Active Pixel Sensor for Charged Particle Detection,”Nuclear Sci. Symposium, Conference Record of the 2002 IEEE, 2002, pp. 259-263.
G. Claus et al., “Monolithic Active Pixel Sensors for a Linear Collider,”Nuclear Instruments&Methods in Physics Research, Section A, vol. A473, 2001, pp. 83-85.
A.R. Faruqi, R. Henderson, S. Subramaniam, “Cooled CCD Detector with Tapered Fibre Optics for Recording Electron Diffraction Patterns”,Ultramicroscopy, vol. 75, 1999, pp. 235-250.
E. Fossum, “Active Pixel Sensors: Are CCD's Dinosaur?”, Proceeding SPIE 1900, 1993, pp. 2-14.
K.H. Downing and D.A. Granio, “Analysis of Photographic Emissions for Electron Microscopy of Two-Dimensional Crystalline Specimens”,Ultramicroscopy, vol. 7, 1982, pp. 381-404.
G.Y. Fan, M.H. Ellisman, “Digital Imaging in Transmission Electron Microscopy”,Journal of Microscop, vol. 199, No. 1, Oct. 2000, pp. 1-13.
CCLRC Centre for Instrumentation, http://www.efi.circ.ac.uk/reports/CFIB-p05-03.pdf, Jun. 2003.
Horacek, M., “Direct Detection of Electrons by Area Aray CCD”, www.isibmo.cz/˜mih/clanky/RadioBmo1999.pfd, 1999.
Finkelstein, H., Ginosar, R., “Front-side-bonbarded metal-plated CMOS electron sensors”, SPIE vol. 3301, Apr. 1998, pp. 186-197.
Roberts, P.T.E. et al., “A CCD-based image recording system for the CTEM”, Ultramicroscopy 8, 1982, pp. 385-396.
Faruqi, A.R., Cattermole, D.M., “Digital Detectors for Electron Microscopy,” Nuclear Instruments and Methods, Feb. 2001, pp. 1-14.
Ellisman Mark H.
Kleinfelder Stuart
Nguyen-Huu Xuong
Greer Burns & Crain Ltd.
Nguyen Kiet T.
The Regents of the University of California
LandOfFree
Direct collection transmission electron microscopy does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Direct collection transmission electron microscopy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Direct collection transmission electron microscopy will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3867577