Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Patent
1996-04-22
1997-09-30
Thomas, Tom
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
257764, 257765, 257753, H01L 2348, H01L 2940, H01L 2954, H01L 2962
Patent
active
056729146
ABSTRACT:
A new method of metallization using a dimple-free tungsten plug is described. Semiconductor device structures are formed in and on a semiconductor substrate. An insulating layer is deposited overlying the semiconductor device structures. An opening is etched through the insulating layer to contact one of the semiconductor device structures. A layer of tungsten is deposited overlying the insulating layer and within the opening. The tungsten layer is coated with a layer of spin-on-glass wherein the spin-on-glass layer planarizes the top surface of the substrate. The spin-on-glass and tungsten layers are etched back leaving the tungsten layer only within the opening as a tungsten plug wherein the presence of the spin-on-glass layer overlying the tungsten layer prevents the formation of a dimple within the tungsten plug completing the formation of the dimple-free tungsten plug in the fabrication of an integrated circuit.
REFERENCES:
patent: 5219789 (1993-06-01), Adan
patent: 5324689 (1994-06-01), Yoo
patent: 5360995 (1994-11-01), Graas
patent: 5374849 (1994-12-01), Tada
patent: 5430328 (1995-07-01), Hsue
patent: 5523624 (1996-06-01), Chen et al.
patent: 5589713 (1996-12-01), Lee et al.
patent: 5623166 (1997-04-01), Olowolafe et al.
Chang Huang-Hui
Huang Yuan-Chang
Pike Rosemary L. S.
Saile George O.
Taiwan Semiconductor Manufacturing Company , Ltd.
Thomas Tom
Williams Alexander Oscar
LandOfFree
Dimple-free tungsten plug does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dimple-free tungsten plug, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dimple-free tungsten plug will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2259188