Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Patent
1998-11-19
2000-10-24
Gupta, Yogendra
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
510175, 510477, 438906, H01L 2130, H01L 213213
Patent
active
061367672
ABSTRACT:
A dilute composition cleaning method uses a cleaning composition including both phosphoric acid and acetic acid. Each of the acidic components may be at a concentration of less than about 10% by volume of a dilute composition. The dilute composition can be used for cleaning various surfaces, such as, for example, patterned metal layers and vias by exposing the surfaces to the dilute composition.
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Blalock Guy T.
Hineman Max
Gupta Yogendra
Micro)n Technology, Inc.
Webb Gregory
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