Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
Reexamination Certificate
2005-01-11
2005-01-11
Webb, Gregory (Department: 1751)
Cleaning compositions for solid surfaces, auxiliary compositions
Cleaning compositions or processes of preparing
For cleaning a specific substrate or removing a specific...
C510S176000, C510S269000, C134S002000, C134S003000
Reexamination Certificate
active
06841525
ABSTRACT:
A cleaning method in a semiconductor fabrication process includes providing a dilute composition consisting essentially of phosphoric acid and acetic acid and exposing a surface, e.g., aluminum, to the dilute composition. For example, the dilute composition includes phosphoric acid at a concentration of about 5% or less by volume and acetic acid at a concentration of about 30% or less by volume. Further, the cleaning method may use a composition comprising phosphoric acid and acetic acid, wherein the composition includes phosphoric acid at a concentration of X %, wherein X is about 5% by volume or less, and acetic acid at a concentration of about (100-X %) by volume or less. The cleaning method may be used, for example, in fabricating interconnect structures, aluminum containing structures, and multilevel interconnect structures. Cleaning compositions for use in the cleaning methods are also provided.
REFERENCES:
patent: 4145451 (1979-03-01), Oles
patent: 4230522 (1980-10-01), Martin et al.
patent: 4256520 (1981-03-01), Koike et al.
patent: 4339340 (1982-07-01), Muraoka et al.
patent: 4415606 (1983-11-01), Cynkar et al.
patent: 4642168 (1987-02-01), Imai
patent: 4681657 (1987-07-01), Hwang et al.
patent: 4895617 (1990-01-01), Roche et al.
patent: 5258093 (1993-11-01), Maniar
patent: 5376235 (1994-12-01), Langley
patent: 5508229 (1996-04-01), Baker
patent: 5560857 (1996-10-01), Sakon et al.
patent: 5689334 (1997-11-01), Atkinson et al.
patent: 5939336 (1999-08-01), Yates
patent: 6012469 (2000-01-01), Li et al.
patent: 6136767 (2000-10-01), Hineman et al.
patent: 6313048 (2001-11-01), Hineman et al.
patent: 6384001 (2002-05-01), Hineman et al.
patent: 0 649 168 (1995-04-01), None
patent: 0 784 336 (1997-07-01), None
patent: 0 789 071 (1997-08-01), None
patent: 50-37372 (1975-04-01), None
patent: 82-016488 (1982-04-01), None
patent: 62-125633 (1987-06-01), None
patent: 62-211391 (1987-09-01), None
patent: 61-22982 (1994-05-01), None
patent: 8-48996 (1996-02-01), None
patent: WO 9705228 (1997-02-01), None
patent: WO 9718582 (1997-05-01), None
Banas, “Passivity of metals in anhydrous solutions of oxy-acids”,Materials Science Forum, 185-188:845-852 (1995).
Dingley et al., “An Improved Bismuth Plating Process”,Plating and Surface Finishing, 63(4):26-33 (1976).
Ghilarducci et al., “The Bordoni Relaxation in High Purity Copper Single Crystals at Low Frequencies”,Journal de Physique IV, 6C8-211-C8-214 (1996).
Molt et al., “Analysis of aqueous solutions by near-infrared spectrometry (NIRS) II. Titrations of weak and very weak acids with strong bases”,Journal of Molecular Structure, 410-411:565-572 (1997).
Petzow, “Chapter 2: Preparation of Metals and Alloys”,Metalographic Etching, American Society for Metals, Gebruder Borntraeger, Berlin, pp. 37 and 96 (1976).
Pons Muzzo, “Observaciones numericas y graficas de la reduccion de volumen de las soluciones acuosas”,Bol. Soc. Quim. Peru, 42(4):179-191 (1976).
Sastri et al., “Studies on the Determination of Surface Deuterium in AISI 1062, 4037, and 4140 Steels by Secondary Ion Mass Spectrometry”,Metallurgical Transactions A, 19A:3071-3075 (1988).
Singh et al., “Active, passive and transpassive dissolution of a nickel base super alloy in concentrated acid mixture solution”,Materials and Corrosion, 46:590-594 (1995).
Viktorova et al., “Aqueous solution of phosphoric acid as the stationary phase for selective separation of fatty acids under conditions of steam chromatography”,Russ. Chem. Bull., 46(3):476-478 (1997).
Blalock Guy T.
Hineman Max
Micro)n Technology, Inc.
Mueting Raasch & Gebhardt, P.A.
Webb Gregory
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