Diffusion tube support collar

Details Diffusion tube support collar Diffusion tube support collar

1979-12-31

1981-07-14

Camby, John J.

Heating

Work chamber having heating means

Combustion products heat work by contact

277229, 277230, 432253, F27B 700, B65D 5300, F02F 1100

Patent

active

042784220

ABSTRACT:
A collar for supporting and positioning a diffusion tube in a furnace used in the manufacture of semiconductors, integrated circuits and the like, is disclosed. The collar has a resilient core and an outer cover enclosing the core. The core and the cover are made of materials which readily withstand the normal operating temperatures of the furnace. The collar is dimensioned to tightly fit around a circumference of the diffusion tube, and to fit within an aperture provided in a support block of the furnace. The collar permits precise positioning of the diffusion tube relative to a helical heating coil provided in the furnace.

REFERENCES:
patent: 2372946 (1945-04-01), Foster et al.
patent: 2667804 (1954-02-01), Boyer et al.
patent: 3183130 (1965-05-01), Reynolds et al.
patent: 3604694 (1971-09-01), Muller
patent: 4156533 (1979-05-01), Close

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