Diffusion tube, dopant source for a diffusion process and...

Details Diffusion tube, dopant source for a diffusion process and... Diffusion tube, dopant source for a diffusion process and...

2011-06-21

2011-06-21

Lund, Jeffrie R (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C118S726000

Reexamination Certificate

active

07963247

ABSTRACT:
According to an exemplary embodiment of the present invention, a diffusion tube includes a diffusion housing which includes a first cavity within a first end which receives a diffusion target, a second cavity within a second end which receives a dopant source for diffusion, and a diffusion port disposed between the diffusion target and the dopant source, wherein the diffusion port provides fluid communication between the first cavity and the second cavity.

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