Diffractive optical elements and methods of making the same

Details Diffractive optical elements and methods of making the same Diffractive optical elements and methods of making the same

2005-06-14

2005-06-14

Norton, Nadine G. (Department: 1765)

Etching a substrate: processes

Forming or treating optical article

C216S026000, C216S083000, C216S095000, C216S099000

Reexamination Certificate

active

06905618

ABSTRACT:
Diffractive optical elements and methods of making the same are described. In one aspect, a diffractive optical element is made by forming a multilayer structure comprising multiple amorphous silicon phase shift layers having respective thicknesses selected so that the diffractive optical element is operable to phase shift infrared light within an operative wavelength range. The amorphous silicon phase shift layers are separated by respective silicon dioxide etch stop layers having respective thicknesses of about 5 nm or less. Layers of the multilayer structure are serially masked and etched to form a multi-step optical structure. In another aspect, a diffractive optical element is made by forming a multilayer structure comprising multiple etch layers separated by respective etch stop layers selectively etchable with respect to the etch layers. One or more of the etch and etch stop layers are substantially opaque to light within an operative wavelength range. Opaque layers are converted into substances substantially transparent to light within the operative wavelength range. Layers of the multilayer structure are serially masked and etched to form a multi-step optical structure.

REFERENCES:
patent: 4895790 (1990-01-01), Swanson et al.
patent: 5218471 (1993-06-01), Swanson et al.
patent: 6021106 (2000-02-01), Welch et al.
patent: 6120942 (2000-09-01), Reinberg
patent: 6187211 (2001-02-01), Smith et al.
patent: 6301001 (2001-10-01), Unno
patent: 6365455 (2002-04-01), Su et al.
patent: 6369948 (2002-04-01), Danziger et al.
patent: 6387787 (2002-05-01), Mancini et al.
patent: 6392792 (2002-05-01), Naulleau
patent: 6562253 (2003-05-01), Ogusu
patent: 6670105 (2003-12-01), Terada et al.
patent: 2002/0047129 (2002-04-01), Frick et al.

Affiliated with

Also associated with

Rating

Diffractive optical elements and methods of making the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Diffractive optical elements and methods of making the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diffractive optical elements and methods of making the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3498060