Diffractive optical element for extreme ultraviolet...

Details Diffractive optical element for extreme ultraviolet... Diffractive optical element for extreme ultraviolet...

2006-04-11

2006-04-11

Chang, Audrey (Department: 2872)

Optical: systems and elements

Light interference

Produced by coating or lamina

C359S580000, C359S569000, C359S361000, C430S005000

Reexamination Certificate

active

07027226

ABSTRACT:
A wavefront modulating optical element device employs two or more materials lithographically patterned with programmed thickness profiles. The spatially-varying thickness profiles are chosen to yield arbitrary relative phase-shift and attenuation upon transmission. The device can be designed to create arbitrary diffractive optical elements with specific applications including diffusers, arbitrary holographic optical elements, null-elements for wavefront compensation and control in interferometry.

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