Diffraction-optical component, illumination system and...

Details Diffraction-optical component, illumination system and... Diffraction-optical component, illumination system and...

2005-04-26

2005-04-26

Ben, Loha (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S287000, C359S305000, C359S311000, C359S312000, C359S254000, C333S141000, C333S145000, C333S195000, C310S31300R, C310S31300R, C310S31300R, C073S03200R, C345S177000, C385S129000, C369S044120

Reexamination Certificate

active

06885491

ABSTRACT:
A diffraction-optical component for providing a radiation-diffracting grating structure is proposed, comprising a surface wave device including a substrate43, a surface wave source47excitable with an adjustable frequency for producing surface waves on a surface45of the substrate43and an interaction region17of the substrate surface45which is provided for the radiation to interact with a grating structure provided by the surface waves produced.To this end, the surface wave source47may have a directional characteristic and emits surface waves stronger in a preferred direction53than in a direction54opposite thereto, the surface wave source may comprises an electro-acoustic transducer which includes spaced apart sections for emitting surface waves at different wavelengths, an electro-acoustic transducer of the surface wave source may be operated as a voltage divider with an intermediate electrode, the frequency for exciting the surface wave source may be adjusted in response to a measuring signal which is obtained by a surface wave receiver73, a surface wave damper73, 87may be provided in the form of an acousto-electric transducer, a closed propagation path may be provided for the surface waves and the grating structure may be formed by standing surface waves.Moreover, an exposure system is proposed which comprises such a diffraction-optical component and a radiation source.

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