Differentially pumped seal apparatus

Details Differentially pumped seal apparatus Differentially pumped seal apparatus

1987-06-15

1988-12-20

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504922, 21912122, 21912124, G21K 508

Patent

active

047926880

ABSTRACT:
A differentially pumped seal apparatus (14) comprising a rough port nozzle (R), a medium port nozzle (M) and a high port nozzle (H), each with a centrally located sleeve (34,36,40) defining concentric apertures (44,48,52). Each nozzle is configured as a sector of a circular cylinder which provides for large channels (62, 72, 76) to be formed for connecting the sleeve apertures (44,48,52) of each nozzle directly to vacuum pumps (46,50,54) to thereby provide a graded seal with high conductance and increased pumping efficiencies, higher vacuum and a smaller gap between the sleeve (34,36,40) and a workpiece (12).

REFERENCES:
patent: 4524261 (1985-06-01), Petric et al.
patent: 4528451 (1985-07-01), Petric et al.

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