Differential pressure sensor with stress reducing pressure balan

Measuring and testing – Fluid pressure gauge – With protective separator

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G01L 700

Patent

active

056842538

ABSTRACT:
The present invention relates generally to a pressure sensor and, more specifically, to a pressure equalization structure that balances the forces on the pressure sensitive component in order to reduce the stress that could otherwise be imposed on its piezoresistors. The pressure sensor provides a housing in which a cavity is formed. Within the cavity, a pressure sensitive component is disposed between a first seal and a second seal in order to expose a first surface of the pressure sensitive component to a first conduit and a second surface of the pressure sensitive component to a second conduit. The pressure surrounding the pressure sensitive structure is generally equalized to one of the first and second conduits by providing a bypass conduit connected therebetween.

REFERENCES:
patent: 5184107 (1993-02-01), Maurer
patent: 5257547 (1993-11-01), Boyer
patent: 5327785 (1994-07-01), Maurer
patent: 5351550 (1994-10-01), Maurer
patent: 5410916 (1995-05-01), Cook
patent: 5412994 (1995-05-01), Cook et al.

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