Process for producing a synthesized reference image for the insp

Details Process for producing a synthesized reference image for the insp Process for producing a synthesized reference image for the insp

1993-10-25

1995-09-19

Boudreau, Leo H.

Image analysis

Applications

Manufacturing or product inspection

382217, 382218, 382278, G06K 960

Patent

active

054523699

ABSTRACT:
A process for synthesizing a reference image of an object by applying real image characteristic element data to characteristic elements of a descriptive (CAD based generated) image. The process includes preprocessing the descriptive image data by identifying characteristic elements of the object in the descriptive dam and determining the coordinates of the characteristic elements. The first format of the descriptive image data and the coordinates of the characteristic elements are subsequently changed to an equivalent descriptive image and equivalent coordinates of the characteristic elements having a second format. The process also includes the acquisition of at least one real image of the object defined in the second format; sampling at least one characteristic element of the real image of the object; centering and preshifting the samples of the object with respect to the second format and applying the obtained centered and preshifted samples of the real image to the equivalent characteristic elements of the descriptive image.

REFERENCES:
patent: 5046113 (1991-09-01), Hoki
patent: 5086477 (1992-02-01), Yu et al.
Takeuchi, S., et al., "Advanced 5X Reticle Inspection Technologies for ULSI Devices" 5-6 Mars 1990, Proceedings of Spie, Integrated Circuit Metrology, Inspection and Process Control IV vol. 1261.

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