Dielectric nanostructure and method for its manufacture

Details Dielectric nanostructure and method for its manufacture Dielectric nanostructure and method for its manufacture

2006-08-03

2009-08-04

Ghyka, Alexander G (Department: 2812)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S584000, C438S781000, C257SE21001, C257SE21062, C977S700000

Reexamination Certificate

active

07569469

ABSTRACT:
The present invention relates to dielectric nanostructures useful in semiconductor devices and other electronic devices and methods for manufacturing the dielectric nanostructures. The nanostructures generally comprises an array of isolated pillars positioned on a substrate. The methods of the present invention involve using semiconductor technology to manufacture the nanostructures from a mixture of a crosslinkable dielectric material and an amphiphilic block copolymer.

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